Dry Etching Tool Explained - Vacuum, Gas and Power
2:29
YouTubeExploring Science & Technology
Dry Etching Tool Explained - Vacuum, Gas and Power
Dry etching is a key process in semiconductor manufacturing, but a dry etch tool needs much more than just a chamber and a wafer. In this video, we look inside a simplified dry etching tool and explain the basic tool functions behind dry etching: vacuum, process gas, and power. Vacuum creates a controlled low-pressure environment. Process gases ...
128 views2 months ago
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